This book is updated with the most recent developments in the field of microelectronic chip production, continuing the legacy of Sze's immensely popular groundbreaking handbook on VLSI technology. These subjects are crucial for the next generation of USLI technologies, which will enable the packaging of more transistors on a single chip, since computer chips are the basis of contemporary electronics. Industry professionals with expertise in fields including low-temperature epitaxy, fast thermal processes, reactive ion etching, low damage plasma, fine line litography, cleaning technology, clean room technology, packing, and dependability contribute to each chapter.


3998 4498-11.12%
  • Brand: McGraw Hill Education
  • SKU: 9780070582910
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Product details

  • C.Y. Chang (Author), Simon Sze (Author) 
  • Publisher ‏ : ‎ McGraw-Hill Education (16 October 1996)
  • Language ‏ : ‎ English
  • Hardcover ‏ : ‎ 688 pages
  • ISBN-10 ‏ : ‎ 0070630623
  • ISBN-13 ‏ : ‎ 978-0070630628
  • Item Weight ‏ : ‎ 1 kg 90 g
  • Dimensions ‏ : ‎ 17.15 x 3.18 x 24.77 cm

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