Smart sensors and MEMS can refer to a wide range of devices and systems with advanced functionality. They accomplish this by incorporating multiple sensing and actuating modes into a single device, or by combining sensing and actuating with information processing, analog-to-digital conversion, and memory functions. Part one discusses industrial applications for smart sensors, including direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral ranges, and advanced optical incremental sensors (encoders and interferometers), among others. The book's second section discusses industrial applications of smart microelectromechanical systems (MEMS). This section's topics include microfabrication technologies used to create smart devices for industrial applications, microactuators, dynamic behavior of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing. Photovoltaic and fuel cells in power MEMS for smart energy management and radio frequency (RF)-MEMS for intelligent communication microsystems. Smart sensors and MEMS is a valuable resource for academics, materials scientists, and electrical engineers working in the microelectronics, sensors, and micromechanics industries, as well as engineers seeking industrial sensing, monitoring, and automation solutions.